Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (8th 2005 Québec, Québec)

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OL5489328A

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Display name
Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (8th 2005 Québec, Québec)
Source identifier
OL5489328A

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Silicon nitride, silicon dioxide thin insulating films, and other emerging diele[c]trics VIII
Representative edition published 2005
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