Workshop on temperature measurement of semiconductor wafers using thermocouples

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Workshop on temperature measurement of semiconductor wafers using thermocouples

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Workshop on temperature measurement of semiconductor wafers us...

Published 2001

Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing and how to achieve the highest accuracy.

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Publisher	U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Format	Microform
Search language	english

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Workshop on temperature measure...
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Workshop on temperature measurement of semiconductor wafers using thermocouples
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology | 2001
Workshop on temperature measure...
WO
Workshop on temperature measurement of semiconductor wafers using thermocouples
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology | 2001