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IEEE/SEMI International Semiconductor Manufacturing Science Symposium. (5th 1993 San Francisco, Calif.)
This page shows the publication-specific record: publisher, date, identifiers, and all of the context needed to decide whether this is the copy you want.
| Publisher | Institute of Electrical and Electronics Engineers |
|---|---|
| Pages | 152 |
| Search language | english |
| ISBN_10 | 0-780-31212-0 primary |
| ISBN_10 | 0-780-31213-9 primary |
| ISBN_10 | 0-780-31214-7 primary |
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