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Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (8th 2005 Québec, Québec)
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| Publisher | Electrochemical Society |
|---|---|
| Pages | 588 |
| Search language | english |
| ISBN_10 | 1-566-77459-4 primary |
| ISBN_13 | 978-1-566-77459-8 primary |
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