Handbook of Microlithography, Micromachining and Microfabrication (Materials and Devices Series)

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Handbook of Microlithography, Micromachining and Microfabrication (Materials and Devices Series)

Prosenjit Rai-Choudhury

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Cover for Handbook of Microlithography, Micromachining and Microfabrication (Materials and Devices Series)

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Prosenjit Rai-ChoudhuryPublished September 30, 2004cover on file

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Publisher	INSPEC, Inc.
Pages	1476
Format	Hardcover
Search language	english
ISBN_10	0-852-96910-4 primary
ISBN_13	978-0-852-96910-6 primary

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