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This invaluable reference offers the latest information on the application of interconnection technology to semiconductors - covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects.
| Publisher | Marcel Dekker |
|---|---|
| Pages | 577 |
| Search language | english |
| ISBN_10 | 0-824-79966-6 primary |
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