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Stefan Landis
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
| Publisher | Wiley & Sons, Incorporated, John |
|---|---|
| Pages | 320 |
| Search language | simple |
| ISBN_13 | 978-1-118-62123-3 primary |
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