Materials Aspects in Microsystem Technologies

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Materials Aspects in Microsystem Technologies

D. Barbier, J. R. Morante, P. Temple-Boyer, G. Mueller, W. Lang

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Materials Aspects in Microsystem TechnologiesD. Barbier, J. R. Morante, P. Temple-Boyer, G. Mueller, W. Lang

D. Barbier, J. R. Morante, P. Temple-Boyer, G. Mueller, W. LangPublished 1999

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Publisher	Elsevier Science & Technology Books
Search language	english
ISBN_13	978-0-080-91305-6 primary

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