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D. Widmann, H. Mader, H. Friedrich
"This book provides expert and comprehensive coverage of current technologies used in the manufacture of VLSI circuits, for process integration up to the Gigabit memory level. It is aimed at advanced students, and also at engineers and scientists working in research, development and production."--BOOK JACKET.
| Edition | 1 edition |
|---|---|
| Publisher | Springer |
| Pages | 358 |
| Format | Hardcover |
| Search language | english |
| ISBN_10 | 3-540-66199-9 primary |
| ISBN_13 | 978-3-540-66199-3 primary |
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