Reactive sputtering applied to microelectronic devices

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Reactive sputtering applied to microelectronic devices

Torbjörn Larsson

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Reactive sputtering applied to microelectronic devicesTorbjörn Larsson

Torbjörn LarssonPublished 1988

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Publisher	Uppsala Universitet, Distributor, Almqvist & Wiksell International
Pages	20
Search language	english
ISBN_10	9-155-42216-0 primary

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