Resonant MEMS

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Resonant MEMS

Oliver Brand, Fabien Josse, Stephen D. Heinrich, Jan G. Korvink, Osamu Tabata

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Oliver Brand, Fabien Josse, Stephen D. Heinrich, Jan G. Korvink, Osamu TabataPublished 20152 title views1 this editioncover on file

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Publisher	Wiley-VCH Verlag GmbH
Pages	512
Search language	simple
ISBN_13	978-3-527-33545-9 primary

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Resonant MEMSOliver Brand, Isabelle Dufour, Stephen Heinrich, Gary K. Fedder, Christofer Hierold
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Resonant MEMSOliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Gary K. Fedder
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Resonant MEMS
Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Gary K. Fedder | Wiley & Sons, Incorporated, John | 2015