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| Publisher | Institute of Electrical and Electronics Engineers, IEEE Service Center |
|---|---|
| Pages | 294 |
| Search language | english |
| ISBN_10 | 0-780-30959-6 primary |
| ISBN_10 | 0-780-30957-X primary |
Publication-specific alternatives linked to the same work.
Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems
Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems