Gettering and Defect Engineering in Semiconductor Technology XI

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Gettering and Defect Engineering in Semiconductor Technology XI

Bernard Pichaud, A. Claverie, Daniel Alquier, Hans Richter, Martin Kittler

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Gettering and Defect Engineering in Semiconductor Technology XIBernard Pichaud, A. Claverie, Daniel Alquier, Hans Richter, Martin Kittler

Bernard Pichaud, A. Claverie, Daniel Alquier, Hans Richter, Martin KittlerPublished 2005

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Publisher	Trans Tech Publications, Limited
Search language	english
ISBN_13	978-3-038-13029-1 primary

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