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P. W. Hawkes
This text features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithology, electron microscopy, and the computing methods used in all these domains.
| Publisher | Elsevier |
|---|---|
| Pages | 449 |
| Format | [electronic resource] |
| Search language | english |
| ISBN_10 | 0-080-57764-4 primary |
| ISBN_13 | 978-0-080-57764-7 primary |
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