Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003

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Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003

Symposim E, "Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics" (2003 San Francisco, Calif.)

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Symposim E, "Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics" (2003 San Francisco, Calif.)Published 2003cover on file

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Publisher	Materials Research Society
Pages	515
Search language	english
ISBN_10	1-558-99703-2 primary

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Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics--2003
Materials Research Society | January 2003