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Chemnitzer Fachtagung Mikromechanik & Mikroelektronik (8th 2007 Chemnitz, Germany)
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| Publisher | Technische Universität Chemnitz, Fakultät für Elektrotechnik und Informationstechnik |
|---|---|
| Pages | 154 |
| Search language | german |
| ISBN_10 | 3-000-22168-9 primary |
| ISBN_13 | 978-3-000-22168-2 primary |
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