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System-Level Modeling of MEMS

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System-Level Modeling of MEMS
SM
Oliver BrandJan G. KorvinkOsamu TabataGary K. FedderChristofer Hierold1 editions

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5 credited authorsSearch language english

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  • Oliver Brand

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  • Jan G. Korvink

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  • Osamu Tabata

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  • Gary K. Fedder

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  • Christofer Hierold

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