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High energy and high dose ion implantation

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High energy and high dose ion implantation
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S. U. CampisanoJ. GyulaiP. L. F. HemmentSymposium C on High Energy Ion Implantation (1991 Strasbourg, France)J. A. Kilner3 editions

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5 credited authorsSearch language english

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  • S. U. Campisano

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  • J. Gyulai

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  • P. L. F. Hemment

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  • Symposium C on High Energy Ion Implantation (1991 Strasbourg, France)

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  • J. A. Kilner

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