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Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods

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Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition...
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Filipe VazMartin FenkerNicolas Martin1 editions

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3 credited authorsSearch language english

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  • Filipe Vaz

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  • Martin Fenker

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  • Nicolas Martin

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