Device and Process Technologies for Mems ,Microelectronics, and Photonics

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Jamieson, DavidVijay VaradanAlex HarizJung-Chih Chiao1 editions

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4 credited authorsSearch language english

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Jamieson, David
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Vijay Varadan
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Alex Hariz
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Jung-Chih Chiao
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Device and process technologies for MEMS, microelectronics, and photonics III
SPIE | 2004