The efficiency of Cu(In,Ga)Se2 (CIGS) solar cells is enhanced when Na is incorporated in the CIGS absorber layer. This work examines Na incorporation in CIGS utilizing Na-doped Mo sputtered from targets made with sodium molybdate-doped (MONA) powder. Mo:Na films with varying thicknesses were sputtered onto Mo-coated borosilicate glass (BSG) or stainless steel substrates for CIGS solar cells. By use of this technique, the Na content of CIGS can be varied from near-zero to higher than that obtained from a soda-lime glass (SLG) substrate. Targets and deposition conditions are described. The doped Mo films are analyzed, and the resulting devices are compared to devices fabricated on Mo-coated SLG as well as Mo-coated BSG with NaF. Completed devices utilizing MONA exceeded 15.7% efficiency without anti-reflective coating, which was consistently higher than devices prepared with the NaF precursor. Strategies for minimizing adhesion difficulties are presented.