Silicon nitride, silicon dioxide, and emerging dielectrics 9

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Silicon nitride, silicon dioxide, and emerging dielectrics 9

Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.)First published 20072 editions

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First publish date 20071 credited authorSearch language english

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Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.)
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Silicon nitride, silicon dioxid...Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.)
SN
Silicon nitride, silicon dioxide, and emerging dielectrics 9
Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.) | Electrochemical Society | 2007
Silicon nitride, silicon dioxid...Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.)
SN
Silicon nitride, silicon dioxide, and emerging dielectrics 9
Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.) | Electrochemical Society | 2007