This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: semiconductor equipment simulation process modeling and simulation device modeling and simulation of complex structures interconnect modeling integrated systems for process, device, circuit simulation and optimisation numerical methods and algorithms compact modeling and parameter extraction modeling for RF applications simulation and modeling of new devices (heterojunction based, SETs, quantum effect devices, laser based ...).