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NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009

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NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009
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Selin H. G. TeoTarik BourouinaHua LiAi-Qun Liu1 editions

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4 credited authorsSearch language english

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  • Selin H. G. Teo

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  • Tarik Bourouina

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  • Hua Li

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  • Ai-Qun Liu

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