Reliability of MEMS

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Reliability of MEMS

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Reliability of MEMS

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Publisher	Wiley-VCH
Pages	303
Search language	english
ISBN_10	3-527-31494-6 primary
ISBN_13	978-3-527-31494-2 primary

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Image source: Open Library
Reliability of MEMS (Advanced Micro and Nanosystems)
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Reliability of MEMSGary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata, Toshiyuki Tsuchiya
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RO
Image source: Open Library
Reliability of MEMS
Osamu Tabata, Oliver Brand, Gary K. Fedder, Toshiyuki Tsuchiya, Christofer Hierold | Wiley-VCH Verlag GmbH | 2013