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Reliability of MEMS

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Oliver BrandJan G. KorvinkOsamu TabataGary K. FedderChristofer HieroldToshiyuki Tsuchiya6 editions

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6 credited authorsSearch language english

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  • Oliver Brand

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  • Jan G. Korvink

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  • Osamu Tabata

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  • Gary K. Fedder

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  • Christofer Hierold

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  • Toshiyuki Tsuchiya

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