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Advances in CMP/polishing technologies for the manufacture of electronic devices

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Ioan D. MarinescuToshiro K. DoiSyuhei Kurokawa1 editions

CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover.

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3 credited authorsSearch language english

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  • Ioan D. Marinescu

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  • Toshiro K. Doi

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  • Syuhei Kurokawa

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