Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses

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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses

Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann

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Christopher Lyle Borst, William N. Gill, Ronald J. GutmannPublished Feb 23, 2014cover on file

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Publisher	Springer
Pages	243
Format	paperback
Search language	english
ISBN_10	1-461-35424-2 primary
ISBN_13	978-1-461-35424-6 primary

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Image source: Open Library
Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann | Springer | September 30, 2002
Chemical-Mechanical Polishing o...Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann | Springer London, Limited | 2013
Chemical-mechanical polishing o...Christopher L. Borst
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Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
Christopher L. Borst | Kluwer Academic Publishers | 2002