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Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses

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William N. GillRonald J. GutmannChristopher Lyle BorstChristopher L. BorstFirst published 20024 editions

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First publish date 20024 credited authorsSearch language english

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  • William N. Gill

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  • Ronald J. Gutmann

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  • Christopher Lyle Borst

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  • Christopher L. Borst

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