Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses

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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses

Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann

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Christopher Lyle Borst, William N. Gill, Ronald J. GutmannPublished September 30, 20021 title viewscover on file

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Edition	1 edition
Publisher	Springer
Pages	248
Format	Hardcover
Search language	english
ISBN_13	978-1-402-07193-5 primary
ISBN_10	1-402-07193-0 primary

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Image source: Open Library
Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann | Springer | Feb 23, 2014
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Chemical-Mechanical Polishing o...Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann | Springer London, Limited | 2013
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Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
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