Handbook of Silicon Based MEMS Materials and Technologies

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Handbook of Silicon Based MEMS Materials and Technologies

Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss

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Handbook of Silicon Based MEMS Materials and TechnologiesMarkku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss

Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst TheussPublished 20201 title views

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Publisher	Elsevier
Search language	english
ISBN_13	978-0-128-17786-0 primary

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Handbook of Silicon Based MEMS Materials and Technologies
Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli | Elsevier Science & Technology Books, William Andrew | 2015
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Handbook of Silicon Based MEMS...Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss
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Handbook of Silicon Based MEMS Materials and Technologies
Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss | Elsevier | 2020
Handbook of Silicon Based MEMS...Markku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko Lindroos
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Handbook of Silicon Based MEMS Materials and Technologies
Markku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko Lindroos | Elsevier Science & Technology Books | 2015
Handbook of Silicon Based MEMS...Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka, Veli-Matti Airaksinen
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Handbook of Silicon Based MEMS Materials and Technologies
Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka, Veli-Matti Airaksinen | Elsevier Science & Technology Books | 2009