Handbook of Silicon Based MEMS Materials and Technologies

Loading edition detail...

Preparing this view.

Handbook of Silicon Based MEMS Materials and Technologies

Markku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko Lindroos

Bookitis Pick

Handbook of Silicon Based MEMS Materials and TechnologiesMarkku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko Lindroos

Markku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko LindroosPublished 20152 title views

This page shows the publication-specific record: publisher, date, identifiers, and all of the context needed to decide whether this is the copy you want.

Main catalog entry More like this

Publisher	Elsevier Science & Technology Books
Pages	826
Search language	english
ISBN_13	978-0-323-31223-3 primary

Other editions of this title

Publication-specific alternatives linked to the same work.

HO
Image source: Open Library
Handbook of Silicon Based MEMS Materials and Technologies
Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli | Elsevier Science & Technology Books, William Andrew | 2015
1 views
Handbook of Silicon Based MEMS...Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss
HO
Handbook of Silicon Based MEMS Materials and Technologies
Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss | Elsevier | 2020
1 views
Handbook of Silicon Based MEMS...Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss
HO
Handbook of Silicon Based MEMS Materials and Technologies
Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss | Elsevier | 2020
Handbook of Silicon Based MEMS...Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka, Veli-Matti Airaksinen
HO
Handbook of Silicon Based MEMS Materials and Technologies
Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka, Veli-Matti Airaksinen | Elsevier Science & Technology Books | 2009