Handbook of Silicon Based MEMS Materials and Technologies

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Handbook of Silicon Based MEMS Materials and Technologies

Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli

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Cover for Handbook of Silicon Based MEMS Materials and Technologies

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Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku TilliPublished 2015cover on file

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Publisher	Elsevier Science & Technology Books, William Andrew
Pages	826
Search language	english
ISBN_13	978-0-323-29965-7 primary

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