Handbook of Silicon Based MEMS Materials and Technologies
Work detail
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HO
Image source: Open LibrarySami FranssilaMatthias PetzoldVeikko LindroosMervi Paulasto-KröckelMarkku TilliMervi Paulasto-KrockelTeruaki MotookaHorst TheussAri LehtoVeli-Matti Airaksinen5 editions
This page groups all known editions belonging to the same underlying work.
Overview
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10 credited authorsSearch language english
Contributors
People credited with this work in the active catalog.
- Open Author
Sami Franssila
- Open Author
Matthias Petzold
- Open Author
Veikko Lindroos
- Open Author
Mervi Paulasto-Kröckel
- Open Author
Markku Tilli
- Open Author
Mervi Paulasto-Krockel
- Open Author
Teruaki Motooka
- Open Author
Horst Theuss
- Open Author
Ari Lehto
- Open Author
Veli-Matti Airaksinen
Editions
Publication-specific versions linked to this work only.
- Image source: Open LibraryHO
Handbook of Silicon Based MEMS Materials and Technologies
- HOHandbook of Silicon Based MEMS...Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss
Handbook of Silicon Based MEMS Materials and Technologies
- HOHandbook of Silicon Based MEMS...Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss
Handbook of Silicon Based MEMS Materials and Technologies
- HOHandbook of Silicon Based MEMS...Markku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko Lindroos
Handbook of Silicon Based MEMS Materials and Technologies
- HOHandbook of Silicon Based MEMS...Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka, Veli-Matti Airaksinen
Handbook of Silicon Based MEMS Materials and Technologies
