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Handbook of Silicon Based MEMS Materials and Technologies

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Sami FranssilaMatthias PetzoldVeikko LindroosMervi Paulasto-KröckelMarkku TilliMervi Paulasto-KrockelTeruaki MotookaHorst TheussAri LehtoVeli-Matti Airaksinen5 editions

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10 credited authorsSearch language english

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  • Sami Franssila

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  • Matthias Petzold

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  • Veikko Lindroos

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  • Mervi Paulasto-Kröckel

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  • Markku Tilli

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  • Mervi Paulasto-Krockel

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  • Teruaki Motooka

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  • Horst Theuss

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  • Ari Lehto

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  • Veli-Matti Airaksinen

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